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Three experts from Dürr Systems AG, centrotherm clean solutions GmbH & Co. KG and Palas Instruments (Shanghai) Co., Ltd. give insights on solutions in the field of environmental technology and sustainability.
Dürr's Thermal Oxidation processes for air purification in China
- Electrical and fuel fired regenerative thermal oxidizers
- Direct fired incinerators for explosive gases and liquid waste
- Dürr's air purification experience in China and Jiangsu province
centrotherm clean solutions - Effective Greenhouse Gas Reduction in Semiconductor Industry through Smart Point-of-use Gas Abatements
Perfluorocarbon gases (PFCs), having been widely used as etch precursors in semiconductor industry, are part of significant Global Warming Potential (GWP) gases. Thorough treatment of those PFC gases has fully challenges of high consumption of primary energy source (fuel gas or electricity), high destructive removal efficiency (DRE) and emission of NOX associated with abating combustion process. By using smart abatement system, high reduction potential of PFCs / CO2e and significant saving in fuel energy and O2 could be realized in semiconductor industry, due to intelligent communication of manufacturing process equipment and abatement systems with automatic adjustment of combustor power intensity and proposed minimization of N2-pump purge flow to just needed level into the abating combustor.
WHO New AQG 2021 and Palas's Support in Finding Local Pollution
In recent years, China's air quality has improved significantly, while particulate matter remains to be one of the main pollutants in urban ambient air. With the release of WHO's "Global Air Quality Guidance" in 2021, focus of particulate matter control in China and the world will continue. In China, the challenge comes more from fine particulates. It is necessary to study the source, cause, and change of fine particulate matter. Palas SPADS technology can measure 5 PM values simultaneously and provides PSD info. as low as 180nm, which facilitates online monitoring and particle size traceability in the background of declining particle pollution levels.
Agenda
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Dürr’s Thermal Oxidation processes for air purification in China
Carsten Walddoerfer16
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Dürr’s Thermal Oxidation processes for air purification in China
Speakers
Carsten Walddoerfer
Team Leader R&D, Product Management at Dürr Systems AGEffective greenhouse gas reduction through smart point-of-use gas abatement
Speakers
Xinan JIA
General Manager Asia at centrotherm clean solutions GmbH & Co. KGWHO New AQG 2021 and Palas's Support in Finding Local Pollution
Speakers
Jun DENG
Business Development Manager at Palas Instruments (Shanghai) Co., Ltd.Speakers
Carsten
Walddoerfer
Team Leader R&D, Product Management at Dürr Systems AG
Xinan JIA
General Manager Asia at centrotherm clean solutions GmbH & Co. KG
Jun DENG
Business Development Manager at Palas Instruments (Shanghai) Co., Ltd.
Sponsors and Partners
Organizer
TRENT
The implementation phase of TRENT, the Transnational Competence Center for Environmental Technology and Research Jiangsu Baden-Württemberg, is funded by the Ministry of the Environment, Climate Protection and the Energy Sector of the State of Baden-Württemberg from November 2020 to April 2023. In addition to Karlsruhe Institute of Technology (KIT) and the State Agency for Environmental Technology and Resource Efficiency Baden-Württemberg (UTBW), the office of Baden-Württemberg International in Nanjing (BW_i Nanjing) is also contributing to the competence center with its network in Jiangsu.
https://www.trent-platform.info/index.php
wbk Institute of Production Science
Shorter product life-cycles, diverse variety, increasing pace of innovations and increasing complexity in production technology place increased demands on the industry. Consequently, entrepreneurial decisions bear high risks, which in turn requires not only new forms of teamwork but also for the business network to be viewed as one whole production system. The core components processes, organizations and resources must permit a high development and innovation capability corresponding to the dynamic company demands. Therefore, the aim of the production systems department is the development of methods and tools for target orientated designing and optimization of quicker, more robust and more efficient production systems. New approaches will be developed according to individual industrial requirements starting from strategic business planning and organization right upto production control, and this being transformed into a company's success.
https://www.wbk.kit.edu/english/index.php
